Jothiramalingam Kulothungan, Huynh Van Ngoc, Manoharan Muruganathan, Hiroshi Mizuta
Abstract
Nano Electro Mechanical (NEM) contact switches have been widely studied as one of the alternative for classical field effect transistor (FET). An ideal NEM contact switch with hysteresis free switching slope (SS) of 0 mV/dec is desired to achieve the ultimate scaling of the complementary metal oxide semiconductor (CMOS) integrated circuits (IC) but never realized. Here we show, low pull-in voltage, hysteresis free graphene based NEM contact switch with hBN as a contact larger. The hysteresis voltage is greatly reduced by exploiting the weak adhesion energy between the graphene and hexagonal boron nitride (hBN). The graphene NEM contact switch with hBN as contact exhibits low pull-in voltage of < 2 V, high contact life time of more than 6x10^4 switching cycles, ON/OFF ratio of 10^4 orders of magnitude and hysteresis voltage of as small as < 0.1 V. Our G-hBN NEM contact switch can be potentially used in ultra-low power energy efficient CMOS IC's.